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50篇 您的检索式：作者名="Zorman C"

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	题名	作者	年代	出处	被引量
1	SiC MEMS: Opportunities and challenges for applications in harsh environments显示文摘	Mehregany M Zorman C A	1999	Thin Solid Films1999，，：	1
2	Micro-and nanomechanical structures for silicon carbide MEMS and NEMS显示文摘	Zorman C A Parro R	2008	Phys Status Solidi B2008，245，7：	1
3	SiC MEMS:Opportunities and Challenges for Applications in Harsh Environments显示文摘	Mehregany M Zorman C A	1999	Thin Solid Films1999，，：	1
4	Nano device motion at microwave frequencies 显示文摘	HUANG X M H ZORMAN C A MEHREGANY M	2003	Nature2003，421，6922：	1
5	Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications显示文摘	Fu X A Dunning J L Zorman C A	2005	Sens Actuat A2005，119，：	1
6	Growth of Polycrystalline SiC Films on SiO2 and Si3 N4 by APCVD显示文摘	Wu C Hung Zorman C A Mehregany M	2000	Thin Solid Films2000，355，：	1
7	Silicon carbide MEMS for harsh environments 显示文摘	Mehregany M Zorman C A Rajan N	1998	Proceedings of the IEEE1998，86，8：	1
8	Growth of polycrystalline SiC films on SiO2 and SiaN4 by APCVD显示文摘	Wu C H Zorman C A Mehregany M	1999	Thin Solid Films1999，355，356：	1
9	Effect of MEMS compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers显示文摘	Rajan N Zorman C A Mehregany M	1998	Surface and Coatings Technology1998，，：	1
10	Growth of polycrystalline SiC films on SiO2 and Si3N4 by APCVD 显示文摘	ZORMAN C A MEHREGANY M	1999	Thin Solid Films1999，，：	1
11	Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications 显示文摘	DUNNING J L ZORMAN C A	2005	Sensors and Actuators A2005，119，：	1
12	The mechanical properties of polycrystalline 3C-SiC films grown on polysilicon substrates by atmospheric pressure chemical-vapor deposition显示文摘	Roy S Zorman C Mehregany M	2006	J Appl Phys2006，99，：	1
13	Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition 显示文摘	Fu X A Dunning J L Zorman C A	2005	Thin Solid Films2005，492，：	1
14	Silicon carbide MEMS for harsh environments 显示文摘	MEHREGANY M ZORMAN C A RAJAN N	1998	Proceedings of IEEE1998，86，8：	1
15	Low voltage nanoelectromechanical switches based on silicon carbide nanowires显示文摘	Feng X L Matheny M H Zorman C A	2010	Nano Letters2010，10，：	1
16	Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications 显示文摘	Wu Chienhung Zorman C A Mehregany M	2006	IEEE Sensors Journal2006，6，：	1
17	Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications 显示文摘	FU X A DUNNING J L ZORMAN C A	2005	Sensors and Actuators A: Physical2005，119，1：	1
18	Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition 显示文摘	FU X A DUNNING J L ZORMAN C A	2005	Thin Solid Films2005，492，12：	1
19	Mechanical characterization of chemical -vapor- deposited polyerystaltine 3C silicon carbide thin films 显示文摘	NAGAPPA S ZUPAN M ZORMAN C A	2008	Scripta Materialia2008，59，9：	1
20	Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications 显示文摘	WU C H ZORMAN C A MEHREGANY M	2006	IEEE Sensors Journal2006，6，2：	1

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