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72篇 您的检索式：作者名="MEHREGANY M"

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	题名	作者	年代	出处	被引量
1	Electric micromotor dynamics显示文摘	Bart S F Mehregany M Tavrow L S	1992	IEEE Transactions on Electron Devices1992，39，3：	1
2	Micromotor dynamics in lubricating fluids显示文摘	Deng K Ramanathan G P Mehregany M	1994	J Micromech Microeng1994，4，：	1
3	A simple fabrication process for polysilicon side-drive micromotors显示文摘	Deng K Mehregany M Dewa A S	1994	J Microelectromechanic Systems1994，3，4：	1
4	SiC MEMS: Opportunities and challenges for applications in harsh environments显示文摘	Mehregany M Zorman C A	1999	Thin Solid Films1999，，：	1
5	Introduction to MEMS 显示文摘	Mehregany M Roy S	1999	Microengineering Aerospace Systems El Segundo CA Aerospace Press1999，，47：	1
6	SiC MEMS:Opportunities and Challenges for Applications in Harsh Environments显示文摘	Mehregany M Zorman C A	1999	Thin Solid Films1999，，：	1
7	Nano device motion at microwave frequencies 显示文摘	HUANG X M H ZORMAN C A MEHREGANY M	2003	Nature2003，421，6922：	1
8	High-aspect-ratio photolithography for MEMS applications 显示文摘	Miyajima H Mehregany M	1995	Journal of Micro-Electro-Mechanical Systems1995，4，4：	1
9	A silicon carbide capacitive pressure sen- sor for in-cylender pressure measurement 显示文摘	Chen L Mehregany M	2008	Sensors and Actua- tors A2008，，28：	1
10	Growth of Polycrystalline SiC Films on SiO2 and Si3 N4 by APCVD显示文摘	Wu C Hung Zorman C A Mehregany M	2000	Thin Solid Films2000，355，：	1
11	Silicon carbide MEMS for harsh environments 显示文摘	Mehregany M Zorman C A Rajan N	1998	Proceedings of the IEEE1998，86，8：	1
12	Growth of polycrystalline SiC films on SiO2 and SiaN4 by APCVD显示文摘	Wu C H Zorman C A Mehregany M	1999	Thin Solid Films1999，355，356：	1
13	Effect of MEMS compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers显示文摘	Rajan N Zorman C A Mehregany M	1998	Surface and Coatings Technology1998，，：	1
14	Contact physics of gold microcontaets for MEMS switches 显示文摘	HYMAN D MEHREGANY M	1999	IEEE Transactions on Components and Packaging Technologies1999，22，3：	1
15	Growth of polycrystalline SiC films on SiO2 and Si3N4 by APCVD 显示文摘	ZORMAN C A MEHREGANY M	1999	Thin Solid Films1999，，：	1
16	A Position-sensitive Detector for Neutron Powder Diffraction显示文摘	Mildner DFR Mehregany M	1984	J Appl Cryst1984，17，：	1
17	The mechanical properties of polycrystalline 3C-SiC films grown on polysilicon substrates by atmospheric pressure chemical-vapor deposition显示文摘	Roy S Zorman C Mehregany M	2006	J Appl Phys2006，99，：	1
18	Silicon carbide MEMS for harsh environments 显示文摘	MEHREGANY M ZORMAN C A RAJAN N	1998	Proceedings of IEEE1998，86，8：	1
19	Electromechanical computing at 500℃ with silicon carbide 显示文摘	Lee T H Bhunia S Mehregany M	2010	Science2010，329，：	1
20	Micro- fabricated Electrohydrodynamic Pumps显示文摘	Bart S F Tavrow L S Mehregany M	1990	Sensors and Actuators A1990，21，：	1

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