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14篇 您的检索式:作者名="BOUROUINA T"
    题名 作者 年代 出处 被引量
1Modeling micropumps with electrical equivalent networks 显示文摘BOUROUINA T GRANDCHAMP J P 1996Jour- nal of Micromechanics and Microengineering1996,6,4:1
2Effect of direct current bias field and alternating current excitation field on vibration amplitudes and resonance frequencies of a magnetos trictively actuated bimorph microresonator 显示文摘Bourouina T Garnier A Fujita H 2002Journal of Applied Physics2002,91,1:1
3A new silicon condense rmicro-phone with a p+ silicon membrane显示文摘BOUROUINA T 1992Sensors and Actuators A1992,31,:1
4The MEMSNAS process:microloading effect for micromachining 3-D structures of nearly all shapes显示文摘Bourouina T Masuzawa T Fujita H 2004Microelectromechanical System2004,13,2:1
5Modeling micropumps with electrical equivalent networks显示文摘BOUROUINA T GRANDCHAMP J P 1996Journal of Micromechanics and Microengineerings1996,6,4:1
6Design and simulation of an electrostatic micropump for drug-delivery applications 显示文摘Bourouina T Bosseboeuf A Grandchamp J P 1997Journal of Micromechanics and Microengi- neering1997,7,3:1
7Microsystem tool for microsystems characterization profile measurement of high aspect-ratio microstruetures显示文摘Pourciel J B Lebrasseur E Bourouina T 2001Device and Process Technologies for MEMS and Microelectronies Ⅱ2001,4295,1:1
8Sensors and Actuators A显示文摘Bourouina T Vauge C Mekki H 199549: 21-271995,49,:1
9A new silicon condenser microphone with a p+ silico n membrane显示文摘Bourouina T 1992Sensors and Actuators A1992,31,:1
10The MEMSNAS Process: Microloading effect for micromachining 3-D structures of nearly all shapes 显示文摘T Bourouina T Masuzawa H Fujita 2004Microelectromechanical System2004,13,2:1
11Modeling Micropumps with Electrical Equivalent Networks 显示文摘Bourouina T Grandchamp J P 1996J Micromech Micro- eng1996,6,4:1
12The MEMSNAS process: Microloading effect for micromachining 3 -D structures of nearly all shapes 显示文摘Bourouina T Masuzawa T Fujita H 2004Journal of Systems2004,13,2:1
13A new silicon condense microphone with a p + silicon membrane显示文摘 1992Sensors and Actuators1992,31,:1
14Develop- ment of on-CMOS chip micro-photonic and MOEMS systems 显示文摘SNYMAN L W OKHAI T BOUROUINA T 2011Proceedings of SHE2011,7930,:1
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