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76篇 您的检索式：期刊名="IEEE Trans Semiconductor Manufacturing"

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	题名	作者	年代	出处	被引量
1	Scheduling semiconductor wafer fabrication显示文摘	WEIN L M	1988	IEEE Trans on Semiconductor Manufacturing1988，1，3：	1
2	A new scheduling approach using combined dispatching criteria in wafer fabs显示文摘	RUSS M D JOHN W F	2003	IEEE Trans on Semiconductor Manufacturing2003，16，3：	1
3	Run by Run Process Control: Combing SPC and Feedback Control显示文摘	Ingolfsson A Sachs E	1995	IEEE Trans on Semiconductor Manufacturing1995，8，1：	1
4	Stochastic wafer fabrication scheduling显示文摘	Shen Y X Leachman R C	2003	IEEE Trans on Semiconductor Manufacturing2003，16，1：	1
5	Model reduction for optimization of rapid thermal chemical vapor deposition systems 显示文摘	Theodoropoulou A Adomaitis R A Zafiriou E	1998	IEEE Trans on Semiconductor Manufacturing1998，11，1：	1
6	Statistical device models from worst case files and electrical test data 显示文摘	Singhal K Visvanathan V	1999	IEEE Trans Semiconductor Manufacturing1999，12，4：	1
7	Modeling,analysis,simulation,scheduling,and control of semiconductor manufacturing systems:a Petri net approach显示文摘	Meng Chu Zhou Mu Der Jeng	1998	IEEE Trans on Semiconductor Manufacturing1998，11，3：	1
8	MBPCA application for fault detection in NMOS fabrication 显示文摘	Lachman-Shalem S Himovitch N	2002	IEEE Trans Semiconductor Manufacturing2002，15，1：	1
9	Modeling and simulation of an electronic component manufacturing system using hybrid Petri nets显示文摘	Alla H	1998	IEEE Trans Semiconductor Manufacturing1998，11，3：	1
10	Reactor Design Considerations for MOCVD Growth of Thin Films显示文摘	ZIBA NAMI AHMET ERBIL GARY S MAY	1997	IEEE Trans on Semiconductor Manufacturing1997，10，2：	1
11	Efficient scheduling policies to reduce mean and variance of cycle-time in somiconductor manufacturing plants显示文摘	LU S C H RAMASWAMY D KUMAR P R	1994	IEEE Trans on Semiconductor Manufacturing1994，7，：	1
12	Scheduling semiconductor wafer fabrication显示文摘	WEIN L M	1988	IEEE Trans Semiconductor Manufacturing1988，1，：	1
13	A new TCAD-based statistical methodology for the optimization and sensitivity analysis of semiconductor technologies 显示文摘	Williams S Varahramyan K	2000	IEEE Trans Semiconductor Manufacturing2000，13，2：	1
14	Statistical device models from worst case files and electrical test data 显示文摘	Singhal K Visvanathan V	1999	IEEE Trans Semiconductor Manufacturing1999，12，4：	1
15	The removal of airborne molecular contamination in cleanroom using PIFE and chemical filters显示文摘	YEH C F HSIAO C W LIN S J	2004	IEEE Trans on Semiconductor Manufacturing2004，17，2：	1
16	Scheduling semiconductor wafer fabrication 显示文摘	Wein L M	1988	IEEE Trans Semiconductor Manufacturing1988，1，1：	1
17	Dynamic batching heuristic for simultaneous processing 显示文摘	GLASSEY C R WENG W W	1991	IEEE Trans on Semiconductor Manufacturing1991，4，5：	1
18	A thermal Van Der Pauw test structure显示文摘	RUTHER P PLATTNER L	2000	IEEE Trans on Semiconductor Manufacturing2000，13，2：	1
19	A Discussion of Yield Modeli ng with Defect Clustering, Circuit Repair and Circuit Redundancy显示文摘	Michalka T L Varshney R C Meindl J D	1990	IEEE Tran s on Semiconductor Manufacturing1990，3，3：	1
20	A decision support system for spare parts management in a wafer fabrication facility 显示文摘	Elif A Martin D R D	2001	IEEE Trans on Semiconductor Manufacturing2001，14，1：	1

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